Mie resonance-mediated antireflection effects of Si nanocone arrays fabricated on 8-in. wafers using

Nanoscale Research Letters 10 Article number: 164

https://doi.org/10.1186/s11671-015-0865-8

Eunah Kim, Yunae Cho, Kwang-Tae Park, Jun-Hyuk Choi, Seung-Hyuk Lim, Yong-Hoon Cho, Yoon-Ho Nam, Jung-Ho Lee and Dong-Wook Kim

Abstract

We fabricated 8-in. Si nanocone (NC) arrays using a nanoimprint technique and investigated their optical characteristics. The NC arrays exhibited remarkable antireflection effects; the optical reflectance was less than 10% in the visible wavelength range. The photoluminescence intensity of the NC arrays was an order of magnitude larger than that of a planar wafer. Optical simulations and analyses suggested that the Mie resonance reduced effective refractive index, and multiple scattering in the NCs enabled the drastic decrease in reflection.