The formation of different structures in the interaction between a single femtosecond laser pulse an

Applied Physics A 108, 639-644

https://doi.org/10.1007/s00339-012-6943-1

Zhongyi Guo · Jinmei Feng · Keya Zhou · Yanjun Xiao · Shiliang Qu · Jung-Ho Lee

Abstract

The interactions between femtosecond (fs) laser pulses and a thin Au film deposited on a silica glass substrate were systematically investigated based on experimental data. Different structures, including microholes, nanoholes, and nanobumps, are obtained when pulses with different energies are incident on the surface of a gold film. The experimental results are discussed according to specific experimental parameters. Two physical models were constructed in order to explain the experimental results. The formation of nanoholes in a silica substrate is attributed to etching by higher order harmonic generations (HHG) when the femtosecond laser pulse interacts with the generated plasma layer, while the formation of nanobumps on the surface of an Au film is attributed to the elastic and plastic characteristics of the metal film under laser pulse irradiation.